Jose Mourinho’s side took a deserved lead in the 26th minute when Sami Khedira sent Kaka clear on the left and the Brazilian crossed for Higuain to poke the ball into the net.
They doubled their lead 10 minutes into the second half after CSKA goalkeeper Sergei Chepchugov could only divert Ronaldo’s long-range strike on to a post and in and Benzema followed up his own shot to net Real’s third 20 minutes from time moments after coming off the bench. Ronaldo tapped in a fourth in stoppage time.
Zoran Tosic rewarded the travelling CSKA fans with a goal 13 minutes from time when he rounded Pepe and lashed the ball high past Iker Casillas from just outside the area, prompting a furious reaction from Mourinho on the side of the pitch.
Roared on by their vocal travelling support, CSKA made a bright start and should have taken the lead in the eighth minute when Seydou Doumbia sped clear but the Ivory Coast forward blasted a wild shot over the crossbar.
Real gradually seized control and came close to a second shortly before halftime when Higuain just failed to get on the end of another low Kaka centre.
Chepchugov had to be alert to block a Ronaldo effort immediately after the break before Real midfielder Xabi Alonso picked up a booking that will keep him out of the first leg of the quarter-final.
The result on a balmy night in the Spanish capital secured Real their place in Friday’s draw for the last eight as the La Liga leaders seek a first continental title since 2002.
Watch the match's goals
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